The dry vacuum pump SDE303X manufactured by Kashiyama Industries in Japan has the following features:

1. Oil-free dry technologyIt adopts a screw-type/claw-type rotor structure, achieving gas compression through precisely meshing rotors. The entire process is oil-free, preventing oil vapor contamination, making it suitable for sensitive processes such as wafer fabrication.

2. Pumping speed range10~1,500 m³/h, ultimate vacuum 0.1 Pa (0.001 mbar).

3. Corrosion-resistant designThe rotor and chamber are coated with stainless steel or ceramic coating, resistant to acidic gases (such as HCl, Cl₂) and particulate matter.

4. Energy-efficient and high-performanceVariable Frequency Drive (VFD) adjusts the rotational speed, reducing energy consumption by 30% to 50% compared to oil-sealed pumps.

5. Intelligent Control and MonitoringReal-time parameter display, including data such as vacuum level, temperature, and power consumption, which can be output via a touchscreen or remote interface (Modbus/Ethernet). Self-diagnosis system with vibration and temperature sensors to provide early warnings for anomalies (such as overload or foreign object ingress), and automatic shutdown protection.。

6. Typical Application ScenariosSemiconductors and electronics, chemicals and pharmaceuticals, new energy, and other fields.。