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The JQ-900 float zone single crystal growth furnace is a large-scale, highly reliable, high-precision, and highly automated single crystal growth equipment integrating mechanics, optics, and electronics. Its overall performance indicators have reached the international ** level among similar products. It is primarily used to produce 6-8 inch large-size float zone single crystal silicon, with a maximum single crystal length of up to 2500mm. The purity of single crystals can reach 99.99999999%, and their wafers are primarily used in cutting-edge technology fields such as IGBT chips, thyristors, infrared detectors, and aerospace and marine applications. Additionally, with their 23% photoelectric conversion efficiency, we can boldly attempt to use them in the field of photovoltaic power generation.
1. | Main Furnace Chamber | Inner furnace chamber diameter [mm] | Φ902X1190 high |
2 | The upper secondary chamber | Furnace diameter [mm] | Φ500 X1800 high |
3 | The lower auxiliary chamber | Furnace Diameter [mm] | Φ500 X2500 high |
4 | Upper transmission | Stroke [mm] | 2000 |
Spindle Speed [rpm] | 0-30±1% | ||
Spindle diameter [mm] | 100 | ||
5 | Lower transmission | Spindle travel [mm] | 2600 |
Spindle Speed [rpm] | 0-30±1% | ||
Spindle diameter [mm] | 100 | ||
Inner axis stroke [mm] | 340 | ||
6 | Translation: Translational component | Stroke [mm] | ±25 |
7 | Slot circuit component | Stroke [mm] | 530 |
8 | Reflex ring | Stroke [mm] | 50 |
Fast moving speed [mm/min] | 20 | ||
9 | Preheating Ring Assembly | Stroke [mm] | 285 |
Fast moving speed [mm/min] | 100 | ||
10 | Prepare the shape. | Length X Width X Height [mm] | 6600X4200X14000 |
11 | Vacuum system | Vacuum degree (mbar) | ≤0.01 |
12 | Gas path system | Intake Pressure [Ba] | 5-12 (Recommended 10) |
Growth gas flow rate [L/min] | 50 | ||
Gas Mass | C57-0305, Grade 4.8 | ||
13 | Cooling System | Inlet Pressure [Ba] | 4-6 |
Inlet water temperature [°C] | 12-25 | ||
Inlet flow rate [L/min] | 200 | ||
Physical Cleanliness [mm] | 0.38 | ||
14 | Electrical appliance | Power Frequency [Hz] | 50 or 60 |
Voltage [VAc] | 3X380 | ||
Generator output power (kW) | 120KW | ||
Control Power (Hz) | 50 or 60 | ||
Voltage [VAc] | 3X380 | ||
Power | 10KW | ||
Rectification and filtering of the incoming power supply. | Yes, I have. | ||
Control system | Siemens S7-300 | ||
Human-Machine Interface Control | Pro-face touchscreen | ||
CCD monitoring system | Keyence | ||
Up and down transmission mobile drive | Lenze drive |
