Ceramic carrier plates feature high planar precision, high morphological accuracy, and a long service life. The entire production process ensures reliable craftsmanship and stable quality, enabling excellent performance under various operating conditions. They effectively address issues such as electrode indentation, plate cracking, and poor corrosion resistance. In practical applications, they achieve high-quality CMP polishing of semiconductor wafer materials, breaking the technological monopoly of foreign manufacturers and successfully achieving domestic substitution.
Zhengzhou Research Institute for Abrasives & Grinding Co., Ltd.
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